INITIAL DEFORMATION OF SINX/AL CANTILEVERS ACCORDING TO THERMAL BUDGET FOR MEMS SENSORS
نویسندگان
چکیده
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ژورنال
عنوان ژورنال: Journal of the Russian Universities. Radioelectronics
سال: 2018
ISSN: 1993-8985
DOI: 10.32603/1993-8985-2018-21-4-47-56